Organic EL Vacuum Deposition Device
Organic EL Vacuum Deposition Device
The mask alignment mechanism achieves nano-order alignment using a fine motion piezo XY table and a coarse motion stepping motor XYΘ table.
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Organic EL Vacuum Deposition Device
The mask alignment mechanism achieves nano-order alignment using a fine motion piezo XY table and a coarse motion stepping motor XYΘ table.